Fabrication of flexible electrically conductive polymer based micro-patterns using plasma discharge

Abstract

The application of polymer based micro-patterns in the field of flexible micro-electronics has become the focus as to replace rigid and planar silicon based integrated circuits with weak bendability. Polyethylene terephthalate (PET) can be used as a substrate because of its excellent flexible and mechanical properties and polyaniline (PANI) is a typical representative of the electrical conductive polymers applicable for this purpose. PANI excels by a stable and controllable electrical conductivity, high environment stability, and ease fabrication [1]. An improvement of electrical conductivity of PANI can be achieved using different nano-particles, such as carbon nanotubes (CNTs). CNTs since their discovery [2] have attracted attention due to their excellent electrical, thermal, and mechanical properties [3], and had divergent applications [4], such as complex nano/micro-electronic devices, energy storage and both chemical and bio sensors [5]. This research was focused on the preparation of micro-patterns based on electrically conductive PANI using shaping mold and cold plasma acting as adhesion promoter for PET substrate. The PANI/CNTs nano-composite was used to enhance an electrical conductivity of prepared micro-patterns. The adhesion of prepared micro-patterns was evaluated based on the peel tests measurement. Various microscopic techniques, such as profilometry, scanning electron microscopy and atomic force microscopy (AFM), proved the homogeneous structures of prepared polymer based micro-patterns. Broad dielectric spectroscopy and conductive AFM confirmed electrical behavior of prepared micro-patterns.