Browsing Mathematics, Statistics & Physics by Author "Cardin, J."
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Comprehensive investigation of Er2O3 thin films grown with different ALD approaches
L., Khomenkova; Merabet, H.; Chauvat, M.-P.; Frilay, C.; Portier, X.; Labbe, C.; Marie, P.; Cardin, J.; Boudin, S.; Rueff, J.-M.; Gourbilleau, F.... more authors ... less authors ( Elsevier , 2022 , Article)The effect of Er precursor nature (Er(CpMe)3 or Er(tmhd)3) and annealing treatment at 500–1100 °C on the structural and optical properties of Er2O3 films grown on Si substrates by thermal or O2-plasma-assisted atomic layer ...