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Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped and gallium-doped zinc oxide thin films as transparent conductive electrodes
(
SPIE
, 2015 , Conference Paper)
Zinc oxide and aluminum/gallium-doped zinc oxide thin films were deposited via sol-gel spin-coating technique. Employing plasma treatment as alternative to post thermal annealing, we found that the morphologies of these ...