• Influence of TMAl preflow on AlN epitaxy on sapphire 

      Sun, Haiding; Wu, Feng; Park, Young Jae; Al tahtamouni, T. M.; Li, Kuang-Hui; ... more authors ( American Institute of Physics Inc. , 2017 , Article)
      The trimethylaluminum (TMAl) preflow process has been widely applied on sapphire substrates prior to growing Al-polar AlN films by metalorganic chemical vapor deposition. However, it has been unclear how the TMAl preflow ...
    • Revealing microstructure and dislocation behavior in BAlN/AlGaN heterostructures 

      Sun, Haiding; Wu, Feng; Park, Young Jae; Al tahtamouni, T. M.; Liao, Che Hao; ... more authors ( Japan Society of Applied Physics , 2018 , Article)
      We reveal the microstructure and dislocation behavior in 20-pair B0.14Al0.86N/Al0.70Ga0.30N multiple-stack heterostructures (MSHs) exhibiting an increasing dislocation density along the c-axis, which is attributed to the ...