Browsing Chemistry & Earth Sciences by Subject "RF magnetron sputtering"
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SiGe@Cu films as stable and high energy density anodes for lithium-ion microbatteries
( Springer , 2020 , Article)In this work, the deposition of stoichiometric SiGe alloy on Cu substrate by radio frequency (RF) magnetron sputtering was examined. The structure, morphology, and composition of the SiGe@Cu were identified by X-ray ... -
Sputtered manganese oxide thin film on carbon nanotubes sheet as a flexible and binder-free electrode for supercapacitors
( John Wiley and Sons Ltd , 2019 , Article)In this work, flexible carbon nanotubes (CNTs)/manganese oxide (MnO2) composite electrode was fabricated by direct deposition of MnO2 nanoparticles on CNTs sheet by RF magnetron sputtering. The surface morphology and ...