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المؤلفZagho, Moustafa M.
المؤلفDawoud, Hana D.
المؤلفBensalah, Nasr
المؤلفAltahtamouni, T. M.
تاريخ الإتاحة2022-12-12T05:59:35Z
تاريخ النشر2018-11-30
اسم المنشورEmergent Materials
المعرّفhttp://dx.doi.org/10.1007/s42247-018-0018-9
الاقتباسZagho, M. M., Dawoud, H. D., Bensalah, N., & Altahtamouni, T. M. (2019). A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films. Emergent Materials, 2(1), 79-93.
الرقم المعياري الدولي للكتاب2522-5731
معرّف المصادر الموحدhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85075869840&origin=inward
معرّف المصادر الموحدhttp://hdl.handle.net/10576/37159
الملخصA great part of interest has been paid for fabricating new materials with novel mechanical, optical, and electrical properties. Boron carbon nitride (BCN) ternary system was applied for variable bandgap semiconductors and systems with extreme hardness. The purpose of this literature review is to provide a brief historical overview of B4C and BN, to review recent research trends in the BCN synthesizes, and to summarize the fabrication of BCN thin films by plasma sputtering technique from B4C and BN targets in different gas atmospheres. Pre-set criteria are used to discuss the processing parameters affecting BCN performance which includes the gasses flow ratio and effect of temperature. Moreover, many characterization studies such as mechanical, etching, optical, photoluminescence, XPS, and corrosion studies of the RF sputtered BCN thin films are also covered. We further mentioned the application of BCN thin films to enhance the electrical properties of metal-insulator-metal (MIM) devices according to a previous report of Prakash et al. (Opt. Lett. 41, 4249, 2016).
راعي المشروعQatar University (QU) - No. GCC-2017-007.
اللغةen
الناشرSpringer
الموضوعBoron carbon nitride
Gas flow ratio
Metal-insulator-metal device
Radio frequency sputtering
العنوانA brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films
النوعArticle
الصفحات79-93
رقم العدد1
رقم المجلد2
ESSN2522-574X
dc.accessType Open Access


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