Analysis Of Al Diffusion In Molten Germanium Induced By Pulsed Nd: Yag Laser Using Sims Technique

Abstract

In this work the volume diffusion coefficients and profile distribution of Al impurities in molten germanium have been measured using secondary-iron mass spectroscopy (SIMS) technique. Diffusion is achieved with aid of Nd:Yag laser pulses. In this study it is shown that the diffusion coefficients and profile distribution of impurities are extremely sensitive to laser energy density. The calculated diffusion coefficients are ranging from 6.69 x 10"9 to 5.9 x 10~9 cm2.s'l