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Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped and gallium-doped zinc oxide thin films as transparent conductive electrodes

المؤلفZhu Z.
المؤلفMankowski T.
المؤلفBalakrishnan K.
المؤلفShikoh A.S.
المؤلفTouati F.
المؤلفBenammar M.A.
المؤلفMansuripur M.
المؤلفFalco C.M.
تاريخ الإتاحة2022-05-22T11:03:08Z
تاريخ النشر2015
اسم المنشورProceedings of SPIE - The International Society for Optical Engineering
المصدرScopus
المعرّفhttp://dx.doi.org/10.1117/12.2186144
معرّف المصادر الموحدhttp://hdl.handle.net/10576/31453
الملخصZinc oxide and aluminum/gallium-doped zinc oxide thin films were deposited via sol-gel spin-coating technique. Employing plasma treatment as alternative to post thermal annealing, we found that the morphologies of these thin films have changed and the sheet resistances have been significantly enhanced. These plasma-treated thin films also show very good optical properties, with transmittance above 90% averaged over the visible wavelength range. Our best aluminum/gallium-doped zinc oxide thin films exhibit sheet resistances (Rs) of ~ 200 Ω/sq and ~ 150 Ω/sq, respectively.
اللغةen
الناشرSPIE
الموضوعAluminum
Aluminum coatings
Conductive films
Deposition
Optical properties
Oxide films
Plasma applications
Sheet resistance
Sol-gel process
Sol-gels
Zinc
Zinc coatings
Zinc oxide
Gallium doped zinc oxides
Plasma treatment
Post-thermal annealing
Sol-gel deposition
Sol-gel spin coating
Transparent conductive electrodes
Visible-wavelength range
Zinc oxide thin films
Thin films
العنوانSol-gel deposition and plasma treatment of intrinsic, aluminum-doped and gallium-doped zinc oxide thin films as transparent conductive electrodes
النوعConference Paper
رقم المجلد9561


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