Browsing College of Arts & Sciences by Subject "Radio frequency sputtering"
Now showing items 1-1 of 1
-
A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films
( Springer , 2018 , Article)A great part of interest has been paid for fabricating new materials with novel mechanical, optical, and electrical properties. Boron carbon nitride (BCN) ternary system was applied for variable bandgap semiconductors and ...