Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped and gallium-doped zinc oxide thin films as transparent conductive electrodes
| Author | Zhu Z. |
| Author | Mankowski T. |
| Author | Balakrishnan K. |
| Author | Shikoh A.S. |
| Author | Touati F. |
| Author | Benammar M.A. |
| Author | Mansuripur M. |
| Author | Falco C.M. |
| Available date | 2022-05-22T11:03:08Z |
| Publication Date | 2015 |
| Publication Name | Proceedings of SPIE - The International Society for Optical Engineering |
| Resource | Scopus |
| Identifier | http://dx.doi.org/10.1117/12.2186144 |
| Abstract | Zinc oxide and aluminum/gallium-doped zinc oxide thin films were deposited via sol-gel spin-coating technique. Employing plasma treatment as alternative to post thermal annealing, we found that the morphologies of these thin films have changed and the sheet resistances have been significantly enhanced. These plasma-treated thin films also show very good optical properties, with transmittance above 90% averaged over the visible wavelength range. Our best aluminum/gallium-doped zinc oxide thin films exhibit sheet resistances (Rs) of ~ 200 Ω/sq and ~ 150 Ω/sq, respectively. |
| Language | en |
| Publisher | SPIE |
| Subject | Aluminum Aluminum coatings Conductive films Deposition Optical properties Oxide films Plasma applications Sheet resistance Sol-gel process Sol-gels Zinc Zinc coatings Zinc oxide Gallium doped zinc oxides Plasma treatment Post-thermal annealing Sol-gel deposition Sol-gel spin coating Transparent conductive electrodes Visible-wavelength range Zinc oxide thin films Thin films |
| Type | Conference Paper |
| Volume Number | 9561 |
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