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AuthorWasim, Muhammad Faisal
AuthorTayyaba, Shahzadi
AuthorAshraf, Muhammad Waseem
AuthorAhmad, Zubair
Available date2023-01-16T11:02:20Z
Publication Date2020-07-02
Publication NameSensors (Switzerland)
Identifierhttp://dx.doi.org/10.3390/s20143931
CitationWasim, M.F.; Tayyaba, S.; Ashraf, M.W.; Ahmad, Z. Modeling and Piezoelectric Analysis of Nano Energy Harvesters. Sensors 2020, 20, 3931. https://doi.org/10.3390/s20143931
URIhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85087959731&origin=inward
URIhttp://hdl.handle.net/10576/38457
AbstractThe expedient way for the development of microelectromechanical systems (MEMS) based devices are based on two key steps. First, perform the simulation for the optimization of various parameters by using different simulation tools that lead to cost reduction. Second, develop the devices with accurate fabrication steps using optimized parameters. Here, authors have performed a piezoelectric analysis of an array of zinc oxide (ZnO) nanostructures that have been created on both sides of aluminum sheets. Various quantities like swerve, stress, strain, electric flux, energy distribution, and electric potential have been studied during the piezo analysis. Then actual controlled growth of ZnO nanorods (NRs) arrays was done on both sides of the etched aluminum rod at low-temperature using the chemical bath deposition (CBD) method for the development of a MEMS energy harvester. Micro creaks on the substrate acted as an alternative to the seed layer. The testing was performed by applying ambient range force on the nanostructure. It was found that the voltage range on topside was 0.59 to 0.62 mV, and the bottom side was 0.52 to 0.55 mV. These kinds of devices are useful in low power micro-devices, nanoelectromechanical systems, and smart wearable systems.
SponsorOpen Access funding was provided by the Qatar National Library. This work is supported by Qatar University Internal Grant No. QUCG-CAM-2020\21-1.
Languageen
PublisherMDPI
SubjectAluminum
ANSYS
MEMS
Piezoelectric
ZnO nanorods
TitleModeling and piezoelectric analysis of nano energy harvesters
TypeArticle
Issue Number14
Volume Number20
ESSN1424-8220
dc.accessType Open Access


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